This video is unavailable watch queue queue watch queue queue. In situ fabrication and process control techniques in rapid thermal processing volume 224 mehrdad m moslehi john kuehne richard yeakley lino velo habib najm bill dostalik david yin cecil j davis. Thermocouples are often used as a calibration standard for rapid thermal processing although it has been recognized that the thermocouple temperature can be different from the wafer temperature the magnitude of the temperature difference is difficult to quantify. Rapid thermal processing rtp is a well established single wafer technology in usli semiconductor manufacturing and electrical engineering as well as in materials science the biggest advantage of rtp is that it eliminates the long ramp up and ramp down times associated with furnaces enabling a significant reduction in the thermal budget. Like many of the technologies used to process integrated circuits the road to manufacturing for rapid thermal processing rtp has been twisted what began as a speculative laboratory apparatus has evolved into a cornerstone of ic technology
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